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    <journal-meta>
      <journal-id journal-id-type="issn">1561-5405</journal-id>
	    <journal-id journal-id-type="doi">10.24151/1561-5405</journal-id>	  
      <journal-id journal-id-type="publisher-id">Proceedings of Universities. Electronics</journal-id>
      <journal-title-group>
        <journal-title xml:lang="en">Scientifical and technical journal "Proceedings of Universities. Electronics"</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технический журнал «Известия высших учебных заведений. Электроника»</trans-title>
        </trans-title-group>        
      </journal-title-group>      
      <issn publication-format="print">1561-5405</issn>
      <issn publication-format="online">2587-9960</issn>
      <publisher>
        <publisher-name xml:lang="en">National Research University of Electronic Technology</publisher-name>
        <publisher-name xml:lang="ru">Национальный исследовательский университет "Московский институт электронной техники"</publisher-name>
      </publisher>
    </journal-meta>
    <article-meta>                                    
      
    <article-id pub-id-type="doi">10.24151/1561-5405-2024-29-4-447-455</article-id><article-id pub-id-type="risc">BCJDOR</article-id><article-id pub-id-type="udk">538.975: 621.383.52</article-id><article-categories><subj-group><subject>Технологические процессы и маршруты</subject></subj-group></article-categories><title-group><article-title xml:lang="en">Laser formation of suspended graphene channels for photosensitive detectors</article-title><trans-title-group xml:lang="ru"><trans-title>Лазерное формирование подвешенных графеновых каналов  фоточувствительных детекторов</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author"><string-name xml:lang="ru">Некрасов Никита Петрович</string-name><name-alternatives><name xml:lang="ru"><surname>Некрасов</surname><given-names>Никита Петрович</given-names></name><name xml:lang="en"><surname>Nekrasov</surname><given-names>Nikita P.</given-names></name></name-alternatives><string-name xml:lang="en">Nikita P. Nekrasov</string-name><xref ref-type="aff" rid="AFF-1"/></contrib><contrib contrib-type="author"><string-name xml:lang="ru">Мурашко Денис Тарасович</string-name><name-alternatives><name xml:lang="ru"><surname>Мурашко</surname><given-names>Денис Тарасович</given-names></name><name xml:lang="en"><surname>Murashko</surname><given-names>Denis T.</given-names></name></name-alternatives><string-name xml:lang="en">Denis T. Murashko</string-name><xref ref-type="aff" rid="AFF-1"/></contrib><contrib contrib-type="author"><string-name xml:lang="ru">Василевский Павел Николаевич</string-name><name-alternatives><name xml:lang="ru"><surname>Василевский</surname><given-names>Павел Николаевич</given-names></name><name xml:lang="en"><surname>Vasilevsky</surname><given-names>Pavel N.</given-names></name></name-alternatives><string-name xml:lang="en">Pavel N. Vasilevsky</string-name><xref ref-type="aff" rid="AFF-1"/></contrib><contrib contrib-type="author"><string-name xml:lang="ru">Герасименко Александр Юрьевич</string-name><name-alternatives><name xml:lang="ru"><surname>Герасименко</surname><given-names>Александр Юрьевич</given-names></name><name xml:lang="en"><surname>Gerasimenko</surname><given-names>Alexander Yu.</given-names></name></name-alternatives><string-name xml:lang="en">Alexander Yu. Gerasimenko</string-name><xref ref-type="aff" rid="AFF-1"/></contrib><contrib contrib-type="author"><string-name xml:lang="ru">Неволин Владимир Кириллович</string-name><name-alternatives><name xml:lang="ru"><surname>Неволин</surname><given-names>Владимир Кириллович</given-names></name><name xml:lang="en"><surname>Nevolin</surname><given-names>Vladimir K.</given-names></name></name-alternatives><string-name xml:lang="en">Vladimir K. Nevolin</string-name><xref ref-type="aff" rid="AFF-1"/></contrib><contrib contrib-type="author"><string-name xml:lang="ru">Бобринецкий Иван Иванович</string-name><name-alternatives><name xml:lang="ru"><surname>Бобринецкий</surname><given-names>Иван Иванович</given-names></name><name xml:lang="en"><surname>Bobrinetskiy</surname><given-names>Ivan I.</given-names></name></name-alternatives><string-name xml:lang="en">Ivan I. Bobrinetskiy</string-name><xref ref-type="aff" rid="AFF-1"/></contrib><aff id="AFF-1" xml:lang="ru">National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)</aff></contrib-group><pub-date iso-8601-date="2025-07-29" date-type="pub" publication-format="electronic"><day>29</day><month>07</month><year>2025</year></pub-date><volume>Том. 29 №4</volume><fpage>447</fpage><lpage>455</lpage><self-uri>http://ivuz-e.ru/en/issues/Том 29 №4/lazernoe_formirovanie_podveshennykh_grafenovykh_kanalov_fotochuvstvitelnykh_detektorov/</self-uri><self-uri content-type="pdf">http://ivuz-e.ru#</self-uri><abstract xml:lang="en"><p>Formation of free-standing graphene oxide films used as photodetectors by femtosecond irradiation allows modifying sensitive channel with high precision, without damaging the film. However, graphene channel formation is a task that requires new non-standard solutions. In this work, photovoltaic effect in a free-standing graphene oxide film is considered. It was demonstrated that free-standing graphene oxide films formed by femtosecond irradiation make it possible to avoid the effect of charges on substrate on conductive graphene channel. The control of the formation of a reduced graphene oxide channel was experimentally studied. It was found that the structure is a film layer of graphene oxide deposited from solution on a polydimethylsiloxane substrate with a hole for the free-standing part of the film. The obtained samples were studied using scanning electron microscopy and Raman spectroscopy. It has been established that in these microstructures it is possible to form a given level of photoresponse, depending on the structure restoration degree. Photosensitivity in structures with free-standing graphene oxide is determined by the transitions of the reduced and unreduced regions of the channel and is 0.8 A/W for a wavelength of 630 nm. The device has shown high photosensitivity in the near visible infrared region.</p></abstract><trans-abstract xml:lang="ru"><p>Формирование используемых в качестве фотодетекторов подвешенных каналов оксида графена фемтосекундным излучением позволяет выполнять операции модификации чувствительного канала с высокой точностью, не повреждая пленку. Однако создание графеновых каналов является задачей, требующей новых нестандартных решений. В работе рассмотрен фотовольтаический эффект в подвешенном канале оксида графена. Показано, что свободностоящие пленки оксида графена, сформированные фемтосекундным излучением, позволяют избежать воздействия зарядов на подложке на проводящий подвешенный графеновый канал. Экспериментально исследовано управление формированием восстановленного канала из оксида графена. Выяснено, что структура представляет собой нанесенный осаждением из раствора пленочный слой оксида графена на подложке из полидиметилсилоксана с отверстием под подвешенную часть пленки. Проведены исследования полученных образцов методами сканирующей электронной микроскопии и спектроскопии комбинационного рассеяния. Установлено, что в данных микроструктурах можно формировать заданный уровень фотоотклика в зависимости от степени восстановления структуры. Фоточувствительность в структурах с подвешенным оксидом графена определена переходами восстановленной и невосстановленной областей канала и составляет 0,8 А/Вт для длины волны 630 нм. Устройство показало высокую фоточувствительность в видимом ближнем ИК-диапазоне.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>photosensitive elements</kwd><kwd>two-dimensional materials</kwd><kwd>graphene</kwd><kwd>conductivity control</kwd><kwd>two-dimensional channel</kwd></kwd-group><kwd-group xml:lang="en"><kwd>photosensitive elements</kwd><kwd>two-dimensional materials</kwd><kwd>graphene</kwd><kwd>conductivity control</kwd><kwd>two-dimensional channel</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">Работа выполнена при финансовой поддержке РНФ (грант № 19-19-00401-П), https://rscf.ru/project/19-19-00401/</funding-statement><funding-statement xml:lang="ru">The work has been supported by the Russian Science Foundation (grant no. 19-19-00401-P), https://rscf.ru/project/19-19-00401/</funding-statement></funding-group></article-meta>
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